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SIMS depth profiling of thin boron nitride insulating films

Cwil, M. / Firek, P. / Konarski, P. / Werbowy, A.

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SIMS depth profiling of thin boron nitride insulating films

Cwil, M. / Firek, P. / Konarski, P. / Werbowy, A.

SIMS depth profiling of thin boron nitride insulating films

Cwil, M. / Firek, P. / Konarski, P. / Werbowy, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

SIMS depth profiling of thin boron nitride insulating films

Contributors:

Cwil, M. (author) / Firek, P. (author) / Konarski, P. (author) / Werbowy, A. (author)

Published in:

MATERIALS SCIENCE -WROCLAW- ; 26 ; 135-142

Publication date:

2008-01-01

Size:

8 pages

ISSN:

0137-1339

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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