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Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

Chen, C. Y. / Ling, Y. C. / Hwang, J. F. / Lee, J. H. / Wen, M. L. / Hwang, M. C. / Lin, G. C. / Deng, R. C.

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Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

Chen, C. Y. / Ling, Y. C. / Hwang, J. F. / Lee, J. H. / Wen, M. L. / Hwang, M. C. / Lin, G. C. / Deng, R. C.

Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

Chen, C. Y. / Ling, Y. C. / Hwang, J. F. / Lee, J. H. / Wen, M. L. / Hwang, M. C. / Lin, G. C. / Deng, R. C.

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Document information

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Document information

Title:

Round robin study of chlorine, sulfur and carbon in copper films from Taiwan SIMS users

Contributors:

Chen, C. Y. (author) / Ling, Y. C. (author) / Hwang, J. F. (author) / Lee, J. H. (author) / Wen, M. L. (author) / Hwang, M. C. (author) / Lin, G. C. (author) / Deng, R. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 461-464

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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