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    X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers

    New search for: Kawado, S.

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    X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers

    New search for: Kawado, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers

    New search for: Kawado, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers

    Contributors:

    Kawado, S. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 435-444

    Publication date:

    2002-01-01

    Size:

    10 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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