Fine Machining of Large-Diameter 6H-SiC Wafers

Chen, X. / Li, J. / Ma, D. et al. | British Library Online Contents | 2006

Organic contamination of silicon wafers by buffered oxide etching

Beyer, M. / Budde, K. / Holzapfel, W. | British Library Online Contents | 1993

Germanium: From the first application of Czochralski crystal growth to large diameter dislocation-free wafers

Depuydt, B. / Theuwis, A. / Romandic, I. | British Library Online Contents | 2006

Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

Zanderigo, F. / Ferrari, S. / Queirolo, G. et al. | British Library Online Contents | 2000

Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers

Daio, H. / Yakushiji, K. / Buczkowski, A. et al. | British Library Online Contents | 1995