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Fine Machining of Large-Diameter 6H-SiC Wafers

Chen, X. / Li, J. / Ma, D. / Hu, X. / Xu, X. / Jiang, M.

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Fine Machining of Large-Diameter 6H-SiC Wafers

Chen, X. / Li, J. / Ma, D. / Hu, X. / Xu, X. / Jiang, M.

Fine Machining of Large-Diameter 6H-SiC Wafers

Chen, X. / Li, J. / Ma, D. / Hu, X. / Xu, X. / Jiang, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fine Machining of Large-Diameter 6H-SiC Wafers

Contributors:

Chen, X. (author) / Li, J. (author) / Ma, D. (author) / Hu, X. (author) / Xu, X. (author) / Jiang, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 22 ; 681-684

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Kawado, S. | British Library Online Contents | 2002

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Depuydt, B. / Theuwis, A. / Romandic, I. | British Library Online Contents | 2006

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Burk, A. A. / O Loughlin, M. J. / Paisley, M. J. et al. | British Library Online Contents | 2006