AIN thin films by plasma-enhanced chemical vapour deposition

Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

Crystallization kinetics of hydrogenated amorphous silicon thick films grown by plasma-enhanced chemical vapour deposition

Farjas, J. / Rath, C. / Roura, P. et al. | British Library Online Contents | 2004

Microstructure of thin films prepared by plasma-enhanced chemical vapour deposition of helium-diluted silane

Carabe, J. / Ganda, J.J. / Gonzalez, N. et al. | British Library Online Contents | 1999

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997