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Effect of substrate bias on b-SiC films prepared by PECVD

Wang, B. / Liu, W. / Wang, G. J. / Liao, B. / Wang, J. J. / Zhu, M. K. / Wang, H. / Yan, H.

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Effect of substrate bias on b-SiC films prepared by PECVD

Wang, B. / Liu, W. / Wang, G. J. / Liao, B. / Wang, J. J. / Zhu, M. K. / Wang, H. / Yan, H.

Effect of substrate bias on b-SiC films prepared by PECVD

Wang, B. / Liu, W. / Wang, G. J. / Liao, B. / Wang, J. J. / Zhu, M. K. / Wang, H. / Yan, H.

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Check availability in my library

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Title:

Effect of substrate bias on b-SiC films prepared by PECVD

Contributors:

Wang, B. (author) / Liu, W. (author) / Wang, G. J. (author) / Liao, B. (author) / Wang, J. J. (author) / Zhu, M. K. (author) / Wang, H. (author) / Yan, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 98 ; 190-192

Publication date:

2003-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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