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Strain effects in device processing of silicon-on-insulator materials

Camassel, J. / Tiberj, A.

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Strain effects in device processing of silicon-on-insulator materials

Camassel, J. / Tiberj, A.

Strain effects in device processing of silicon-on-insulator materials

Camassel, J. / Tiberj, A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Strain effects in device processing of silicon-on-insulator materials

Contributors:

Camassel, J. (author) / Tiberj, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 212-213 ; 742-748

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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