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    MOS memory structures by very-low-energy-implanted Si in thin SiO2

    New search for: Dimitrakis, P.
    New search for: Kapetanakis, E.
    New search for: Normand, P.
    New search for: Skarlatos, D.
    New search for: Tsoukalas, D.
    New search for: Beltsios, K.
    New search for: Claverie, A.
    New search for: Benassayag, G.
    New search for: Bonafos, C.
    New search for: Chassaing, D.

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    MOS memory structures by very-low-energy-implanted Si in thin SiO2

    New search for: Dimitrakis, P.
    New search for: Kapetanakis, E.
    New search for: Normand, P.
    New search for: Skarlatos, D.
    New search for: Tsoukalas, D.
    New search for: Beltsios, K.
    New search for: Claverie, A.
    New search for: Benassayag, G.
    New search for: Bonafos, C.
    New search for: Chassaing, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    MOS memory structures by very-low-energy-implanted Si in thin SiO2

    New search for: Dimitrakis, P.
    New search for: Kapetanakis, E.
    New search for: Normand, P.
    New search for: Skarlatos, D.
    New search for: Tsoukalas, D.
    New search for: Beltsios, K.
    New search for: Claverie, A.
    New search for: Benassayag, G.
    New search for: Bonafos, C.
    New search for: Chassaing, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    MOS memory structures by very-low-energy-implanted Si in thin SiO2

    Contributors:

    Dimitrakis, P. (author) / Kapetanakis, E. (author) / Normand, P. (author) / Skarlatos, D. (author) / Tsoukalas, D. (author) / Beltsios, K. (author) / Claverie, A. (author) / Benassayag, G. (author) / Bonafos, C. (author) / Chassaing, D. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 101 ; 14-18

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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