Oxidation of very low energy nitrogen-implanted strained-silicon

Kelaidis, N. / Skarlatos, D. / Ioannou-Sougleridis, V. et al. | British Library Online Contents | 2006

Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon

Martin, T. P. / Jones, K. S. / Camillo-Castillo, R. A. et al. | British Library Online Contents | 2017

Injection of point defects during annealing of low energy As implanted silicon

Tsamis, C. / Skarlatos, D. / Valamontes, V. et al. | British Library Online Contents | 2005

Defect Profiling with Low Energy Positrons of Nitrogen Implanted Silicon

Van der Werf, D. P. / Saleh, A. S. / Towner, A. et al. | British Library Online Contents | 1997

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001