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    Structural and optical properties of nitrogen-incorporated HfO2 gate dielectrics deposited by reactive sputtering

    New search for: He, G.
    New search for: Fang, Q.
    New search for: Li, G. H.
    New search for: Zhang, J. P.
    New search for: Zhang, L. D.

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    Structural and optical properties of nitrogen-incorporated HfO2 gate dielectrics deposited by reactive sputtering

    New search for: He, G.
    New search for: Fang, Q.
    New search for: Li, G. H.
    New search for: Zhang, J. P.
    New search for: Zhang, L. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural and optical properties of nitrogen-incorporated HfO2 gate dielectrics deposited by reactive sputtering

    New search for: He, G.
    New search for: Fang, Q.
    New search for: Li, G. H.
    New search for: Zhang, J. P.
    New search for: Zhang, L. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structural and optical properties of nitrogen-incorporated HfO2 gate dielectrics deposited by reactive sputtering

    Contributors:

    He, G. (author) / Fang, Q. (author) / Li, G. H. (author) / Zhang, J. P. (author) / Zhang, L. D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 8483-8488

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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