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    Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

    New search for: Osterman, J.
    New search for: Abtin, L.
    New search for: Zimmermann, U.
    New search for: Janson, M. S.
    New search for: Anand, S.
    New search for: Hallin, C.
    New search for: Hallen, A.

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    Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

    New search for: Osterman, J.
    New search for: Abtin, L.
    New search for: Zimmermann, U.
    New search for: Janson, M. S.
    New search for: Anand, S.
    New search for: Hallin, C.
    New search for: Hallen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

    New search for: Osterman, J.
    New search for: Abtin, L.
    New search for: Zimmermann, U.
    New search for: Janson, M. S.
    New search for: Anand, S.
    New search for: Hallin, C.
    New search for: Hallen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

    Contributors:

    Osterman, J. (author) / Abtin, L. (author) / Zimmermann, U. (author) / Janson, M. S. (author) / Anand, S. (author) / Hallin, C. (author) / Hallen, A. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 128-131

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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