Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy

    New search for: Osterman, J.
    New search for: Anand, S.
    New search for: Linnarsson, M. K.
    New search for: Hallen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy

    New search for: Osterman, J.
    New search for: Anand, S.
    New search for: Linnarsson, M. K.
    New search for: Hallen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy

    New search for: Osterman, J.
    New search for: Anand, S.
    New search for: Linnarsson, M. K.
    New search for: Hallen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy

    Contributors:

    Osterman, J. (author) / Anand, S. (author) / Linnarsson, M. K. (author) / Hallen, A. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 389/393 ; 663-666

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Scanning spreading resistance microscopy of aluminum implanted 4H-SiC

    Osterman, J. / Abtin, L. / Zimmermann, U. et al. | British Library Online Contents | 2003

    Three Dimensional Carrier Profiling of Individual Si Nanowires by Scanning Spreading Resistance Microscopy

    British Library Online Contents | 2010

    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    Eyben, P. / Janssens, T. / Vandervorst, W. | British Library Online Contents | 2005

    Progress towards a physical contact model for scanning spreading resistance microscopy

    Eyben, P. / Denis, S. / Clarysse, T. et al. | British Library Online Contents | 2003

    Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy

    Schulze, A. / Hantschel, T. / Eyben, P. et al. | British Library Conference Proceedings | 2010

    Back to top