Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy: Fid-Bau Portal

Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy

Buschbeck, H. M. / Erhart, A. / Goeggel, Y. / Rosenblad, C. / Wiltsche, S. / Ramm, J. / Dommann, A. / Kummer, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy

Buschbeck, H. M. / Erhart, A. / Goeggel, Y. / Rosenblad, C. / Wiltsche, S. / Ramm, J. / Dommann, A. / Kummer, M.

Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy

Buschbeck, H. M. / Erhart, A. / Goeggel, Y. / Rosenblad, C. / Wiltsche, S. / Ramm, J. / Dommann, A. / Kummer, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy

Contributors:

Buschbeck, H. M. (author) / Erhart, A. (author) / Goeggel, Y. (author) / Rosenblad, C. (author) / Wiltsche, S. (author) / Ramm, J. (author) / Dommann, A. (author) / Kummer, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 36-40

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Tamura, N. / Shimamune, Y. | British Library Online Contents | 2008

SiGe nanostructures by selective epitaxy and self-assembling

Vescan, L. | British Library Online Contents | 2001

Low-temperature oxidation of SiGe by liquid-phase deposition

Chen, Y. H. / Kung, C. Y. / Hwang, J. D. et al. | British Library Online Contents | 2008

Selective SiGe epitaxy by rtcvd for new device architectures

Ribot, P. / Monfray, S. / Skotnicki, T. et al. | British Library Online Contents | 2002

Atomistic Aspects of Sige Nanostructure Formation by Molecular-Beam Epitaxy

Pchelyakov, O. P. / Bolkhovityanov, Yu. B. / Nikiforov, A.I. et al. | Springer Verlag | 2002