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Low-temperature oxidation of SiGe by liquid-phase deposition

Chen, Y. H. / Kung, C. Y. / Hwang, J. D. / Lin, H. Y. / Chan, H. J. / Chen, P. S.

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Low-temperature oxidation of SiGe by liquid-phase deposition

Chen, Y. H. / Kung, C. Y. / Hwang, J. D. / Lin, H. Y. / Chan, H. J. / Chen, P. S.

Low-temperature oxidation of SiGe by liquid-phase deposition

Chen, Y. H. / Kung, C. Y. / Hwang, J. D. / Lin, H. Y. / Chan, H. J. / Chen, P. S.

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Check availability in my library

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Document information

Title:

Low-temperature oxidation of SiGe by liquid-phase deposition

Contributors:

Chen, Y. H. (author) / Kung, C. Y. (author) / Hwang, J. D. (author) / Lin, H. Y. (author) / Chan, H. J. (author) / Chen, P. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6034-6036

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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