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Thermal reliability of thin SiGe epilayers

Wu, M. J. / Wen, H. C. / Chiang, T. Y. / Tsai, C. H. / Hsu, W. K. / Chou, C. P.

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Thermal reliability of thin SiGe epilayers

Wu, M. J. / Wen, H. C. / Chiang, T. Y. / Tsai, C. H. / Hsu, W. K. / Chou, C. P.

Thermal reliability of thin SiGe epilayers

Wu, M. J. / Wen, H. C. / Chiang, T. Y. / Tsai, C. H. / Hsu, W. K. / Chou, C. P.

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Document information

Title:

Thermal reliability of thin SiGe epilayers

Contributors:

Wu, M. J. (author) / Wen, H. C. (author) / Chiang, T. Y. (author) / Tsai, C. H. (author) / Hsu, W. K. (author) / Chou, C. P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 5001-5004

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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