Effects of precursors on nucleation in atomic layer deposition of HfO2: Fid-Bau Portal

Effects of precursors on nucleation in atomic layer deposition of HfO2

Aarik, J. / Aidla, A. / Kikas, A. / Kaambre, T. / Rammula, R. / Ritslaid, P. / Uustare, T. / Sammelselg, V.

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Effects of precursors on nucleation in atomic layer deposition of HfO2

Aarik, J. / Aidla, A. / Kikas, A. / Kaambre, T. / Rammula, R. / Ritslaid, P. / Uustare, T. / Sammelselg, V.

Effects of precursors on nucleation in atomic layer deposition of HfO2

Aarik, J. / Aidla, A. / Kikas, A. / Kaambre, T. / Rammula, R. / Ritslaid, P. / Uustare, T. / Sammelselg, V.

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Check availability in my library

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Title:

Effects of precursors on nucleation in atomic layer deposition of HfO2

Contributors:

Aarik, J. (author) / Aidla, A. (author) / Kikas, A. (author) / Kaambre, T. (author) / Rammula, R. (author) / Ritslaid, P. (author) / Uustare, T. (author) / Sammelselg, V. (author)

Published in:

APPLIED SURFACE SCIENCE ; 230 ; 292-300

Publication date:

2004-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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