Silicon surface passivation using thin HfO2 films by atomic layer deposition

Gope, J. / Batra, N. / Panigrahi, J. et al. | British Library Online Contents | 2015

Atomic layer deposition of CeO2/HfO2 gate dielectrics on Ge substrate

Maeng, W. J. / Oh, I. K. / Kim, W. H. et al. | British Library Online Contents | 2014

Atomic layer deposition HfO2 capping layer effect on porous low dielectric constant materials

Cheng, Y. L. / Kao, K. C. / Huang, C. J. et al. | British Library Online Contents | 2015

Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures

Jancovic, P. / Hudec, B. / Dobrocka, E. et al. | British Library Online Contents | 2014

Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition

Chesnokov, Y. M. / Miakonkikh, A. V. / Rogozhin, A. E. et al. | British Library Online Contents | 2018