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Contact Resistivity and Barrier Height of Al/Ti Ohmic Contacts on p-Type Ion Implanted 4H- and 6H-SiC
Contact Resistivity and Barrier Height of Al/Ti Ohmic Contacts on p-Type Ion Implanted 4H- and 6H-SiC
Contact Resistivity and Barrier Height of Al/Ti Ohmic Contacts on p-Type Ion Implanted 4H- and 6H-SiC
Scorzoni, A. (author) / Moscatelli, F. (author) / Poggi, A. (author) / Cardinali, G. C. (author) / Nipoti, R. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 881-884
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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