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    Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

    New search for: Makarov, Y.N.
    New search for: Talalaev, R.A.
    New search for: Vorob ev, A.N.
    New search for: Ramm, M.S.
    New search for: Bogdanov, M.V.

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    Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

    New search for: Makarov, Y.N.
    New search for: Talalaev, R.A.
    New search for: Vorob ev, A.N.
    New search for: Ramm, M.S.
    New search for: Bogdanov, M.V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

    New search for: Makarov, Y.N.
    New search for: Talalaev, R.A.
    New search for: Vorob ev, A.N.
    New search for: Ramm, M.S.
    New search for: Bogdanov, M.V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

    Contributors:

    Makarov, Y.N. (author) / Talalaev, R.A. (author) / Vorob ev, A.N. (author) / Ramm, M.S. (author) / Bogdanov, M.V. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 600/603 ; 51-54

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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