Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems: Fid-Bau Portal

Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems

Sartel, C. / Balloud, C. / Souliere, V. / Juillaguet, S. / Dazord, J. / Monteil, Y. / Camassel, J. / Rushworth, S.

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Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems

Sartel, C. / Balloud, C. / Souliere, V. / Juillaguet, S. / Dazord, J. / Monteil, Y. / Camassel, J. / Rushworth, S.

Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems

Sartel, C. / Balloud, C. / Souliere, V. / Juillaguet, S. / Dazord, J. / Monteil, Y. / Camassel, J. / Rushworth, S.

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Title:

Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems

Contributors:

Sartel, C. (author) / Balloud, C. (author) / Souliere, V. (author) / Juillaguet, S. (author) / Dazord, J. (author) / Monteil, Y. (author) / Camassel, J. (author) / Rushworth, S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 217-220

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Low Temperature Epitaxy of 3C SiC using Hexamethyldisilane Precursor on Si <111> Substrates

Wagner, B. / Oliver, J. / Singh, N.B. et al. | British Library Online Contents | 2012

Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System

Sartel, C. / Bluet, J. M. / Souliere, V. et al. | British Library Online Contents | 2003

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Sartel, C. / Souliere, V. / Dazord, J. et al. | British Library Online Contents | 2002

Structural and Electrical Properties of Graphene Films Grown by Propane/Hydrogen CVD on 6H-SiC(0001)

Michon, A. / Roudon, E. / Portail, M. et al. | British Library Online Contents | 2012