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Excess Carrier Lifetime Mapping for Bulk SiC Wafers by Microwave Photoconductivity Decay Method and Its Relationship with Structural Defect Distribution
Excess Carrier Lifetime Mapping for Bulk SiC Wafers by Microwave Photoconductivity Decay Method and Its Relationship with Structural Defect Distribution
Excess Carrier Lifetime Mapping for Bulk SiC Wafers by Microwave Photoconductivity Decay Method and Its Relationship with Structural Defect Distribution
Kato, M. (author) / Ichimura, M. (author) / Arai, E. (author) / Sumie, S. (author) / Hashizume, H. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 505-508
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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