Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments: Fid-Bau Portal

Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

Laugier, F. / Hartmann, J. M. / Moriceau, H. / Holliger, P. / Truche, R. / Dupuy, J. C.

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Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

Laugier, F. / Hartmann, J. M. / Moriceau, H. / Holliger, P. / Truche, R. / Dupuy, J. C.

Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

Laugier, F. / Hartmann, J. M. / Moriceau, H. / Holliger, P. / Truche, R. / Dupuy, J. C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Backside and frontside depth profiling of B delta doping, at low energy, using new and previous magnetic SIMS instruments

Contributors:

Laugier, F. (author) / Hartmann, J. M. (author) / Moriceau, H. (author) / Holliger, P. (author) / Truche, R. (author) / Dupuy, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 668-672

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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