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Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Lopez, E. / Chiussi, S. / Serra, J. / Gonzalez, P. / Serra, C. / Kosch, U. / Leon, B. / Fabbri, F. / Fornarini, L. / Martelli, S.

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Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Lopez, E. / Chiussi, S. / Serra, J. / Gonzalez, P. / Serra, C. / Kosch, U. / Leon, B. / Fabbri, F. / Fornarini, L. / Martelli, S.

Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Lopez, E. / Chiussi, S. / Serra, J. / Gonzalez, P. / Serra, C. / Kosch, U. / Leon, B. / Fabbri, F. / Fornarini, L. / Martelli, S.

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Document information

Title:

Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Contributors:

Lopez, E. (author) / Chiussi, S. (author) / Serra, J. (author) / Gonzalez, P. (author) / Serra, C. (author) / Kosch, U. (author) / Leon, B. (author) / Fabbri, F. (author) / Fornarini, L. (author) / Martelli, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 234 ; 422-428

Publication date:

2004-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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