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Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

Py, M. / Saracco, E. / Damlencourt, J. F. / Barnes, J. P. / Fabbri, J. M. / Hartmann, J. M.

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Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

Py, M. / Saracco, E. / Damlencourt, J. F. / Barnes, J. P. / Fabbri, J. M. / Hartmann, J. M.

Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

Py, M. / Saracco, E. / Damlencourt, J. F. / Barnes, J. P. / Fabbri, J. M. / Hartmann, J. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

Contributors:

Py, M. (author) / Saracco, E. (author) / Damlencourt, J. F. (author) / Barnes, J. P. (author) / Fabbri, J. M. (author) / Hartmann, J. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 9414-9419

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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