Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Kepler, G. M. / Hopfner, C. / Scroggs, J. S. et al. | British Library Online Contents | 1998

Organometallic Compounds as Precursors for Chemical Vapor Deposition of Thin Films of Inorganic Materials

Zanella, P. / Battiston, G. A. / Carta, G. et al. | British Library Online Contents | 1998

Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. et al. | British Library Online Contents | 1993

Organometallic Vapor Phase Epitaxy (OMVPE)

Breiland, W. G. / Coltrin, M. E. / Creighton, J. R. et al. | British Library Online Contents | 1999

Thermal Plasma Chemical Vapor Deposition

Heberlein, J. / Pfender, E. | British Library Online Contents | 1993