Etching of polycrystalline copper by oblique injection of argon ion: Fid-Bau Portal

Etching of polycrystalline copper by oblique injection of argon ion

Taguchi, T. / Yamauchi, Y. / Hirohata, Y. / Hino, T. / Nishikawa, M.

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Etching of polycrystalline copper by oblique injection of argon ion

Taguchi, T. / Yamauchi, Y. / Hirohata, Y. / Hino, T. / Nishikawa, M.

Etching of polycrystalline copper by oblique injection of argon ion

Taguchi, T. / Yamauchi, Y. / Hirohata, Y. / Hino, T. / Nishikawa, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Etching of polycrystalline copper by oblique injection of argon ion

Contributors:

Taguchi, T. (author) / Yamauchi, Y. (author) / Hirohata, Y. (author) / Hino, T. (author) / Nishikawa, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 237 ; 321-325

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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