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Silicon carbon nitride cones prepared from an ellipsoid microwave plasma chemical vapor deposition reactor

Cheng, W. J. / Jiang, J. C. / Zhang, Y. / Zhu, H. S. / Shen, D. Z.

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Silicon carbon nitride cones prepared from an ellipsoid microwave plasma chemical vapor deposition reactor

Cheng, W. J. / Jiang, J. C. / Zhang, Y. / Zhu, H. S. / Shen, D. Z.

Silicon carbon nitride cones prepared from an ellipsoid microwave plasma chemical vapor deposition reactor

Cheng, W. J. / Jiang, J. C. / Zhang, Y. / Zhu, H. S. / Shen, D. Z.

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Check availability in my library

Order at Subito €

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Document information

Title:

Silicon carbon nitride cones prepared from an ellipsoid microwave plasma chemical vapor deposition reactor

Contributors:

Cheng, W. J. (author) / Jiang, J. C. (author) / Zhang, Y. (author) / Zhu, H. S. (author) / Shen, D. Z. (author)

Published in:

MATERIALS LETTERS ; 58 ; 3467-3469

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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Field Emission Properties of Nanocrystalline and Amorphous Silicon Carbon Nitride Prepared from Microwave Plasma Chemical Vapor Deposition

Cheng, W. J. / Jiang, J. C. / Zhang, Y. et al. | British Library Online Contents | 2005

Synthesis of Crystalline Carbon Nitride by Microwave Plasma Chemical Vapor Deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2005

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006

Chemical vapour deposition of silicon nitride in a microwave plasma assisted reactor

Monteiro, O. R. / Wang, Z. / Brown, I. G. | British Library Online Contents | 1996