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Vibrational spectroscopy characterization of low-dielectric constant SiOC:H films prepared by PECVD technique
Vibrational spectroscopy characterization of low-dielectric constant SiOC:H films prepared by PECVD technique
Vibrational spectroscopy characterization of low-dielectric constant SiOC:H films prepared by PECVD technique
Das, G. (author) / Mariotto, G. (author) / Quaranta, A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 295-300
2004-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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