The interaction between Xe and F in Si (100) pre-amorphised with 20keV Xe and implanted with low energy BF2: Fid-Bau Portal

The interaction between Xe and F in Si (100) pre-amorphised with 20keV Xe and implanted with low energy BF2

Werner, M. / van den Berg, J. A. / Armour, D. G. / Carter, G. / Feudel, T. / Herden, M. / Bersani, M. / Giubertoni, D. / Bailey, P. / Noakes, T. C.

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The interaction between Xe and F in Si (100) pre-amorphised with 20keV Xe and implanted with low energy BF2

Werner, M. / van den Berg, J. A. / Armour, D. G. / Carter, G. / Feudel, T. / Herden, M. / Bersani, M. / Giubertoni, D. / Bailey, P. / Noakes, T. C.

The interaction between Xe and F in Si (100) pre-amorphised with 20keV Xe and implanted with low energy BF2

Werner, M. / van den Berg, J. A. / Armour, D. G. / Carter, G. / Feudel, T. / Herden, M. / Bersani, M. / Giubertoni, D. / Bailey, P. / Noakes, T. C.

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Title:

The interaction between Xe and F in Si (100) pre-amorphised with 20keV Xe and implanted with low energy BF2

Contributors:

Werner, M. (author) / van den Berg, J. A. (author) / Armour, D. G. (author) / Carter, G. (author) / Feudel, T. (author) / Herden, M. (author) / Bersani, M. (author) / Giubertoni, D. (author) / Bailey, P. (author) / Noakes, T. C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 198-202

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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