Excimer laser annealing of shallow As and B doped layers: Fid-Bau Portal

Excimer laser annealing of shallow As and B doped layers

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / Magna, A. L. / Privitera, V. / Camalleri, M. / Fortunato, G. / Mariucci, L.

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Excimer laser annealing of shallow As and B doped layers

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / Magna, A. L. / Privitera, V. / Camalleri, M. / Fortunato, G. / Mariucci, L.

Excimer laser annealing of shallow As and B doped layers

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / Magna, A. L. / Privitera, V. / Camalleri, M. / Fortunato, G. / Mariucci, L.

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Title:

Excimer laser annealing of shallow As and B doped layers

Contributors:

Monakhov, E. V. (author) / Svensson, B. G. (author) / Linnarsson, M. K. (author) / Magna, A. L. (author) / Privitera, V. (author) / Camalleri, M. (author) / Fortunato, G. (author) / Mariucci, L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 352-357

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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