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Studies of ultra shallow n+-p junctions formed by low-energy As-implantation

Girginoudi, D. / Georgoulas, N. / Thanailakis, A. / Polychroniadis, E. K.

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Studies of ultra shallow n+-p junctions formed by low-energy As-implantation

Girginoudi, D. / Georgoulas, N. / Thanailakis, A. / Polychroniadis, E. K.

Studies of ultra shallow n+-p junctions formed by low-energy As-implantation

Girginoudi, D. / Georgoulas, N. / Thanailakis, A. / Polychroniadis, E. K.

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Document information

Title:

Studies of ultra shallow n+-p junctions formed by low-energy As-implantation

Contributors:

Girginoudi, D. (author) / Georgoulas, N. (author) / Thanailakis, A. (author) / Polychroniadis, E. K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 381-385

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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