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    Enhanced relaxation of SiGe layers by He implantation supported by in situ ultrasonic treatments

    New search for: Romanjuk, B.
    New search for: Kladko, V.
    New search for: Melnik, V.
    New search for: Popov, V.
    New search for: Yukhymchuk, V.
    New search for: Gudymenko, A.
    New search for: Olikh, Y.
    New search for: Weidner, G.
    New search for: Kruger, D.

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    Enhanced relaxation of SiGe layers by He implantation supported by in situ ultrasonic treatments

    New search for: Romanjuk, B.
    New search for: Kladko, V.
    New search for: Melnik, V.
    New search for: Popov, V.
    New search for: Yukhymchuk, V.
    New search for: Gudymenko, A.
    New search for: Olikh, Y.
    New search for: Weidner, G.
    New search for: Kruger, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Enhanced relaxation of SiGe layers by He implantation supported by in situ ultrasonic treatments

    New search for: Romanjuk, B.
    New search for: Kladko, V.
    New search for: Melnik, V.
    New search for: Popov, V.
    New search for: Yukhymchuk, V.
    New search for: Gudymenko, A.
    New search for: Olikh, Y.
    New search for: Weidner, G.
    New search for: Kruger, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Enhanced relaxation of SiGe layers by He implantation supported by in situ ultrasonic treatments

    Contributors:

    Romanjuk, B. (author) / Kladko, V. (author) / Melnik, V. (author) / Popov, V. (author) / Yukhymchuk, V. (author) / Gudymenko, A. (author) / Olikh, Y. (author) / Weidner, G. (author) / Kruger, D. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 171-175

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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