sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates: Fid-Bau Portal

sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates

Radu, I. / Himcinschi, C. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H. / Buca, D. / Mantl, S. / Loo, R. / Caymax, M.

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sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates

Radu, I. / Himcinschi, C. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H. / Buca, D. / Mantl, S. / Loo, R. / Caymax, M.

sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates

Radu, I. / Himcinschi, C. / Singh, R. / Reiche, M. / Gosele, U. / Christiansen, S. H. / Buca, D. / Mantl, S. / Loo, R. / Caymax, M.

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Title:

sSOI fabrication by wafer bonding and layer splitting of thin SiGe virtual substrates

Contributors:

Radu, I. (author) / Himcinschi, C. (author) / Singh, R. (author) / Reiche, M. (author) / Gosele, U. (author) / Christiansen, S. H. (author) / Buca, D. (author) / Mantl, S. (author) / Loo, R. (author) / Caymax, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 231-234

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Tong, Q.-Y. / Goesele, U. M. | British Library Online Contents | 1999

Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. et al. | British Library Online Contents | 2005

Strained silicon on insulator (SSOI) by waferbonding

Christiansen, S. H. / Singh, R. / Radu, I. et al. | British Library Online Contents | 2005

Formation of thin SiGe virtual substrates by ion implantation into Si substrates

Sawano, K. / Koh, S. / Hirose, Y. et al. | British Library Online Contents | 2004

Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

Perova, T. S. / Lyutovich, K. / Kasper, E. et al. | British Library Online Contents | 2006