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NiSi integration in a non-selective base SiGeC HBT process

Haralson, E. / Suvar, E. / Gunnar Malm, B. / Radamson, H. / Wang, Y. B. / Ostling, M.

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NiSi integration in a non-selective base SiGeC HBT process

Haralson, E. / Suvar, E. / Gunnar Malm, B. / Radamson, H. / Wang, Y. B. / Ostling, M.

NiSi integration in a non-selective base SiGeC HBT process

Haralson, E. / Suvar, E. / Gunnar Malm, B. / Radamson, H. / Wang, Y. B. / Ostling, M.

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Check availability in my library

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Document information

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Document information

Title:

NiSi integration in a non-selective base SiGeC HBT process

Contributors:

Haralson, E. (author) / Suvar, E. (author) / Gunnar Malm, B. (author) / Radamson, H. (author) / Wang, Y. B. (author) / Ostling, M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 245-248

Publication date:

2005-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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