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Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions

Wellmann, P. J. / Straubinger, T. L. / Desperrier, P. / Muller, R. / Kunecke, U. / Sakwe, S. A. / Schmitt, H. / Winnacker, A. / Blanquet, E. / Dedulle, J. M.

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Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions

Wellmann, P. J. / Straubinger, T. L. / Desperrier, P. / Muller, R. / Kunecke, U. / Sakwe, S. A. / Schmitt, H. / Winnacker, A. / Blanquet, E. / Dedulle, J. M.

Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions

Wellmann, P. J. / Straubinger, T. L. / Desperrier, P. / Muller, R. / Kunecke, U. / Sakwe, S. A. / Schmitt, H. / Winnacker, A. / Blanquet, E. / Dedulle, J. M.

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Document information

Title:

Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions

Contributors:

Wellmann, P. J. (author) / Straubinger, T. L. (author) / Desperrier, P. (author) / Muller, R. (author) / Kunecke, U. (author) / Sakwe, S. A. (author) / Schmitt, H. (author) / Winnacker, A. (author) / Blanquet, E. (author) / Dedulle, J. M. (author)

Published in:

Silicon Carbide and Related Materials 2004 ; 25-30

MATERIALS SCIENCE FORUM ; 483/485

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Straubinger, T. L. / Bickermann, M. / Grau, M. et al. | British Library Online Contents | 2000

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Hybrid Physical-Chemical Vapor Transport Growth of SiC Bulk Crystals

Fanton, M. A. / Li, Q. / Polyakov, A. Y. et al. | British Library Online Contents | 2006

Nucleation of Dislocations during Physical Vapor Transport Growth of Silicon Carbide

Sanchez, E. K. / Heydemann, V. D. / Snyder, D. W. et al. | British Library Online Contents | 2000

Growth of Large Diameter SiC Crystals by Advanced Physical Vapor Transport

Anderson, T. / Barrett, D. / Chen, J. et al. | British Library Online Contents | 2005