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    Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor

    New search for: Veneroni, A.
    New search for: Omarini, F.
    New search for: Masi, M.
    New search for: Leone, S.
    New search for: Mauceri, M.
    New search for: Pistone, G.
    New search for: Abbondanza, G.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

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    Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor

    New search for: Veneroni, A.
    New search for: Omarini, F.
    New search for: Masi, M.
    New search for: Leone, S.
    New search for: Mauceri, M.
    New search for: Pistone, G.
    New search for: Abbondanza, G.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor

    New search for: Veneroni, A.
    New search for: Omarini, F.
    New search for: Masi, M.
    New search for: Leone, S.
    New search for: Mauceri, M.
    New search for: Pistone, G.
    New search for: Abbondanza, G.
    New search for: Nipoti, R.
    New search for: Poggi, A.
    New search for: Scorzoni, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Epitaxial Deposition of Silicon Carbide Films in a Horizontal Hot-Wall CVD Reactor

    Contributors:

    Veneroni, A. (author) / Omarini, F. (author) / Masi, M. (author) / Leone, S. (author) / Mauceri, M. (author) / Pistone, G. (author) / Abbondanza, G. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

    Published in:

    Silicon Carbide and Related Materials 2004 ; 57-60

    MATERIALS SCIENCE FORUM ; 483/485

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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