Epitaxial nucleation of polycrystalline silicon carbide during chemical vapor deposition

Sheldon, B. W. / Besmann, T. M. / More, K. L. et al. | British Library Online Contents | 1993

Epitaxial Graphenes on Silicon Carbide

First, P.N. / de Heer, W.A. / Seyller, T. et al. | British Library Online Contents | 2010

Laser reactive ablation deposition of silicon carbide films

Leggieri, G. / Luches, A. / Martino, M. et al. | British Library Online Contents | 1996

4H-SiC Epitaxial Layer Grown on 150 mm Automatic Horizontal Hot Wall Reactor PE106

Mauceri, M. / Pecora, A. / Litrico, G. et al. | British Library Online Contents | 2014

Deposition of epitaxial -SiC films on porous Si(100) from MTS in a hot wall LPCVD reactor

Chiu, C. C. / Desu, S. B. / Chen, G. et al. | British Library Online Contents | 1995