SiC Epitaxial Growth on Multiple 100-mm Wafers and its Application to Power-Switching Devices

Burk, A.A. / O Loughlin, M.J. / Sumakeris, J.J. et al. | British Library Online Contents | 2009

The Effect of Epitaxial Growth on Warp of SiC Wafers

Nakayama, K. / Miyanagi, Y. / Maruyama, K. et al. | British Library Online Contents | 2002

Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996

Crystal-related defects evolution during thin epitaxial layer growth on silicon wafers

Borionetti, G. / Gambaro, D. / Santi, S. et al. | British Library Online Contents | 2000

4H-SiC Epitaxial Growth for High-Power Devices

Tsuchida, H. / Kamata, I. / Jikimoto, T. et al. | British Library Online Contents | 2003