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Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Truong, L. (author) / Fedorenko, Y. G. (author) / Afanas'ev, V. (author) / Stesmans, A. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 197-200
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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