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Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Effect of interlayer composition on passivation of (100)Si/HfO2 interface states by hydrogen
Truong, L. (Autor:in) / Fedorenko, Y. G. (Autor:in) / Afanas'ev, V. (Autor:in) / Stesmans, A. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 197-200
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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