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    Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

    New search for: Aguirre, B.
    New search for: Vemuri, R. S.
    New search for: Zubia, D.
    New search for: Engelhard, M. H.
    New search for: Shutthananadan, V.
    New search for: Bharathi, K. K.
    New search for: Ramana, C. V.

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    Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

    New search for: Aguirre, B.
    New search for: Vemuri, R. S.
    New search for: Zubia, D.
    New search for: Engelhard, M. H.
    New search for: Shutthananadan, V.
    New search for: Bharathi, K. K.
    New search for: Ramana, C. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

    New search for: Aguirre, B.
    New search for: Vemuri, R. S.
    New search for: Zubia, D.
    New search for: Engelhard, M. H.
    New search for: Shutthananadan, V.
    New search for: Bharathi, K. K.
    New search for: Ramana, C. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Order at Subito €

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    Document information
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    Document information
    Title:

    Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target

    Contributors:

    Aguirre, B. (author) / Vemuri, R. S. (author) / Zubia, D. (author) / Engelhard, M. H. (author) / Shutthananadan, V. (author) / Bharathi, K. K. (author) / Ramana, C. V. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 2197-2202

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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