The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films: Fid-Bau Portal

The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films

Moriyama, M. / Morita, T. / Tsukimoto, S. / Shimada, M. / Murakami, M.

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The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films

Moriyama, M. / Morita, T. / Tsukimoto, S. / Shimada, M. / Murakami, M.

The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films

Moriyama, M. / Morita, T. / Tsukimoto, S. / Shimada, M. / Murakami, M.

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Document information

Title:

The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films

Contributors:

Moriyama, M. (author) / Morita, T. (author) / Tsukimoto, S. (author) / Shimada, M. (author) / Murakami, M. (author)

Published in:

MATERIALS TRANSACTIONS ; 46 ; 1036-1041

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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