A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines
New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines
New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines
Mirpuri, K. K. (author) / Szpunar, J. A. (author)
MATERIALS SCIENCE FORUM ; 495/497 ; 1449-1454
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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