Differential Hall profiling of ultra-shallow junctions in Si and SOI: Fid-Bau Portal

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Bennett, N. S. / Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Bennett, N. S. / Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J.

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Bennett, N. S. / Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Differential Hall profiling of ultra-shallow junctions in Si and SOI

Contributors:

Bennett, N. S. (author) / Smith, A. J. (author) / Colombeau, B. (author) / Gwilliam, R. (author) / Cowern, N. E. (author) / Sealy, B. J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 305-309

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Juhel, M. / Laugier, F. / Delille, D. et al. | British Library Online Contents | 2006

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

Optical characterization of laser processed ultra-shallow junctions

Kerrien, G. / Hernandez, M. / Laviron, C. et al. | British Library Online Contents | 2003

Optical, non-destructive characterization of ultra-shallow junctions

Borden, P. | British Library Online Contents | 2001

Evidence of the carrier mobility degradation in highly B-doped ultra-shallow junctions by Hall effect measurements

Severac, F. / Cristiano, F. / Bedel-Pereira, E. et al. | British Library Online Contents | 2008