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    Characteristics of sandwich-structured Al2O3/HfO2/Al2O3 gate dielectric films on ultra-thin silicon-on-insulator substrates

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    New search for: Song, Z.
    New search for: Jiang, J.
    New search for: Yu, Y.

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    Characteristics of sandwich-structured Al2O3/HfO2/Al2O3 gate dielectric films on ultra-thin silicon-on-insulator substrates

    New search for: Cheng, X.
    New search for: Song, Z.
    New search for: Jiang, J.
    New search for: Yu, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characteristics of sandwich-structured Al2O3/HfO2/Al2O3 gate dielectric films on ultra-thin silicon-on-insulator substrates

    New search for: Cheng, X.
    New search for: Song, Z.
    New search for: Jiang, J.
    New search for: Yu, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characteristics of sandwich-structured Al2O3/HfO2/Al2O3 gate dielectric films on ultra-thin silicon-on-insulator substrates

    Contributors:

    Cheng, X. (author) / Song, Z. (author) / Jiang, J. (author) / Yu, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 1876-1882

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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