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Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

Wei, X. / Yuan, H. / Du, H. W. / Xiong, W. / Huang, R. W.

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Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

Wei, X. / Yuan, H. / Du, H. W. / Xiong, W. / Huang, R. W.

Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

Wei, X. / Yuan, H. / Du, H. W. / Xiong, W. / Huang, R. W.

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Order at Subito €

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Document information

Title:

Study on Chemical Mechanical Polishing Mechanism of LiTaO~3 Wafer

Contributors:

Wei, X. (author) / Yuan, H. (author) / Du, H. W. (author) / Xiong, W. (author) / Huang, R. W. (author)

Published in:

KEY ENGINEERING MATERIALS ; 304/305 ; 310-314

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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