Self-implantation of Cz-Si: Clustering and annealing of defects: Fid-Bau Portal

Self-implantation of Cz-Si: Clustering and annealing of defects

Abdulmalik, D. A. / Coleman, P. G. / Al-Qaradawi, I. Y.

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Self-implantation of Cz-Si: Clustering and annealing of defects

Abdulmalik, D. A. / Coleman, P. G. / Al-Qaradawi, I. Y.

Self-implantation of Cz-Si: Clustering and annealing of defects

Abdulmalik, D. A. / Coleman, P. G. / Al-Qaradawi, I. Y.

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Check availability in my library

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Document information

Title:

Self-implantation of Cz-Si: Clustering and annealing of defects

Contributors:

Abdulmalik, D. A. (author) / Coleman, P. G. (author) / Al-Qaradawi, I. Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 3209-3214

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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