Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing: Fid-Bau Portal

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing

Nagano, M. / Tsuchida, H. / Suzuki, T. / Hatakeyama, T. / Senzaki, J. / Fukuda, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing

Nagano, M. / Tsuchida, H. / Suzuki, T. / Hatakeyama, T. / Senzaki, J. / Fukuda, K.

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing

Nagano, M. / Tsuchida, H. / Suzuki, T. / Hatakeyama, T. / Senzaki, J. / Fukuda, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Formation of Extended Defects in 4H-SiC Induced by Ion Implantation/Annealing

Contributors:

Nagano, M. (author) / Tsuchida, H. (author) / Suzuki, T. (author) / Hatakeyama, T. (author) / Senzaki, J. (author) / Fukuda, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 477-480

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Anwand, W. / Brauer, G. / Panknin, D. et al. | British Library Online Contents | 2001

Annealing Behavior of N^+-Implantation-Induced Defects in SiC at Low Temperatures

Satoh, M. / Suzuki, T. / Miyagawa, S. | British Library Online Contents | 2006

Detection and Characterization of Defects Induced by Ion Implantation/Annealing Process in SiC

Nagano, M. / Tsuchida, H. / Suzuki, T. et al. | British Library Online Contents | 2009

Boron interaction with extended defects induced by He-H co-implantation in Si

Gaudin, G. / Cayrel, F. / Bongiorno, C. et al. | British Library Online Contents | 2005

Self-implantation of Cz-Si: Clustering and annealing of defects

Abdulmalik, D. A. / Coleman, P. G. / Al-Qaradawi, I. Y. | British Library Online Contents | 2006