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The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films
The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films
The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films
Awang, R. (author) / Tong, G. B. (author) / Gani, S. M. A. (author) / Ritikos, R. (author) / Rahman, S. A. (author)
MATERIALS SCIENCE FORUM ; 517 ; 81-84
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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